Review Article Open Access

MOCK-UP MACHINE FOR SUBTRACTIVE MANUFACTURING

Abstract

This article discusses the importance of development of equipment for subtractive manufacturing of microelectronics and micromechanics parts. The machine design for subtractive manufacturing of parts with nanometric procession is described. High precision subtractive manufacturing should be based on application of piezoelectric feed drives. It is established that the developed facilities should be equipped with systems of passive and active vibration insulation. The obtained experimental results confirm achievement of nanometric precision of manufacturing by the machine.

ANDREI NIKOLAEVICH AFONIN, VLADIMIR VASILYEVICH LOMAKIN, ANDREY YURYEVICH ALEYNIKOV AND TATYANA ALEKSEEVNA REZNICHENKO

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