Research Article Open Access

Titanium Macroparticle Fraction Suppression with Steered Arc And Negative Pulse Biasing

Abstract

 The result of experimental study of macroparticles (MPs) accumulation on negatively biased substrate immersed in DC vacuum arc titanium plasma are presented. The influence of normal and tangential to cathode surface magnetic field and high-frequency short-pulsed negative bias has been investigated. It was shown that the application of tangential to cathode surface magnetic field instead of normal one allows to reduce titanium MP surface density 2 fold. Applying of short-pulsed bias leads to decreasing of total MPs surface density after 3 minutes of ion-plasma treatment 30 fold.

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